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Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge
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10.1063/1.3062853
/content/aip/journal/apl/93/26/10.1063/1.3062853
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3062853
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the experimental setup used in the present work.

Image of FIG. 2.
FIG. 2.

Possible channels generating BEs in a dc/rf hybrid CCP reactor. Both ion and electron bombardments of the electrodes can lead to BE production.

Image of FIG. 3.
FIG. 3.

EEDs with −800 V on the dc electrode: (a) electrons escaping (dumped) to the rf electrode (detected by analyzer A); (b) bulk plasma electrons (detected by analyzer B). The distribution functions are normalized using the corresponding peak at 800 eV. rf power was 850 W and discharge pressure was 50 mTorr.

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/content/aip/journal/apl/93/26/10.1063/1.3062853
2008-12-31
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3062853
10.1063/1.3062853
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