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High density metal-insulator-metal capacitor based on laminate dielectric
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10.1063/1.2958238
/content/aip/journal/apl/93/3/10.1063/1.2958238
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2958238
/content/aip/journal/apl/93/3/10.1063/1.2958238
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/content/aip/journal/apl/93/3/10.1063/1.2958238
2008-07-22
2015-04-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High density metal-insulator-metal capacitor based on ZrO2∕Al2O3∕ZrO2 laminate dielectric
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2958238
10.1063/1.2958238
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