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Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge
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10.1063/1.2965118
/content/aip/journal/apl/93/3/10.1063/1.2965118
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2965118
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic view of the capacitively coupled plasma chamber.

Image of FIG. 2.
FIG. 2.

The electron density as a function of the radial position ( indicates the discharge center) measured at , , and 50 and .

Image of FIG. 3.
FIG. 3.

Comparison of the radial electron density profiles measured at (, ) 13.56 and . For a simple comparison, the electron densities were normalized to the density at the discharge center.

Image of FIG. 4.
FIG. 4.

Amplitude of the azimuthal magnetic field and corresponding inductive electric field as a function of the radial position at , , and 50 and .

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/content/aip/journal/apl/93/3/10.1063/1.2965118
2008-07-25
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2965118
10.1063/1.2965118
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