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Schematic view of the capacitively coupled plasma chamber.
The electron density as a function of the radial position ( indicates the discharge center) measured at , , and 50 and .
Comparison of the radial electron density profiles measured at (, ) 13.56 and . For a simple comparison, the electron densities were normalized to the density at the discharge center.
Amplitude of the azimuthal magnetic field and corresponding inductive electric field as a function of the radial position at , , and 50 and .
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