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Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge
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10.1063/1.2965118
/content/aip/journal/apl/93/3/10.1063/1.2965118
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2965118
/content/aip/journal/apl/93/3/10.1063/1.2965118
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/content/aip/journal/apl/93/3/10.1063/1.2965118
2008-07-25
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/3/10.1063/1.2965118
10.1063/1.2965118
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