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(a) FESEM image of thick film on -sapphire substrate. (b) Wurtzite ZnO with (along the -axis), (along the -axis), and (along the -axis) as the orthogonal axes. Here, , , and represent parameters of a hexagonal unit cell.
Shows plots of the lattice parameters along (a) , (b) , and (c) with respect to film thickness, with dashed line indicating the relaxed ZnO lattice parameter, respectively.
Shows (a) a plot of strain along , , and with solid lines showing the curve fitting, respectively, and (b) plot of the strain anisotropy with respect to film thickness.
The lattice parameters along , , and with variation in film thickness with standard deviations.
Thermal strains and the fitting coefficient obtained from the curve fitting along , , and with variation in film thickness.
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