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Schematic presentation of a microwave plasma torch operating in a chamber at a reduced pressure.
Plots of the measured plasma density vs the microwave power for argon flow rate of and hydrogen flow rate of at a chamber pressure of .
Plots of vs for the experimental data and the straight line is the least-squares fit to the experimental data.
Fourier transform infrared (FTIR) spectra before and after the microwave plasma torch operation at a nitrogen flow rate of , a flow rate of , a chamber pressure of , and microwave powers of 0.5 and .
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