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Microwave plasma torch operating in a chamber at a low pressure
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10.1063/1.2965459
/content/aip/journal/apl/93/5/10.1063/1.2965459
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/5/10.1063/1.2965459
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic presentation of a microwave plasma torch operating in a chamber at a reduced pressure.

Image of FIG. 2.
FIG. 2.

Plots of the measured plasma density vs the microwave power for argon flow rate of and hydrogen flow rate of at a chamber pressure of .

Image of FIG. 3.
FIG. 3.

Plots of vs for the experimental data and the straight line is the least-squares fit to the experimental data.

Image of FIG. 4.
FIG. 4.

Fourier transform infrared (FTIR) spectra before and after the microwave plasma torch operation at a nitrogen flow rate of , a flow rate of , a chamber pressure of , and microwave powers of 0.5 and .

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/content/aip/journal/apl/93/5/10.1063/1.2965459
2008-08-05
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microwave plasma torch operating in a chamber at a low pressure
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/5/10.1063/1.2965459
10.1063/1.2965459
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