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x-ray diffraction patterns of AlN films grown on Si (100) (black curve) and AlGaN substrates (dashed red curve) (a) and associated rocking curves (b) of the (0002) reflection at .
Evolution of the FWHM of the (0002) peaks obtained from XRD patterns (black square) and from rocking curve (red circle) of the (0002) reflection , for AlN films, for thickness values ranging from deposited on Si (100).
Cross-sectional TEM images of a sputtered AlN film on AlGaN substrate (a), and associated SAED patterns of AlGaN substrate (b), interface (c), AlN sputtered layer (d), and zoom on the diffraction spot of (c) obtained at the interface (e).
HRTEM image of the interface.
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