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Dispersion and loss of ferroelectric thin films up to 110 GHz
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View: Figures


Image of FIG. 1.
FIG. 1.

Capacitance-voltage characteristics measured at 20 GHz with temperature as a parameter. The inset represents the maximum capacitance vs temperature at 20 GHz.

Image of FIG. 2.
FIG. 2.

Log-log representation of loss tangent vs capacitance measured at 20 GHz and various temperatures. The inset represents an IDC pattern.

Image of FIG. 3.
FIG. 3.

Scattering parameters vs frequency of a CPW transmission line. Triangular points are for measurement and solid lines are for simulation. The inset shows the cross section of the CPW line deposited on a sapphire substrate ( and thickness of ). The BST thin film has a thickness of . The metal strips are in gold with a thickness of . The central strip is wide and the slot between the central conductor and the ground planes is . The line length is .

Image of FIG. 4.
FIG. 4.

Frequency dependence of the apparent capacitance and quality factor of an IDC. Triangular points are for measurement and solid lines are for the equivalent circuit. The inset (a) shows the Cole–Cole evolution of complex permittivity for the BST film and (b) is the equivalent circuit of the IDC.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dispersion and loss of ferroelectric Ba0.5Sr0.5TiO3 thin films up to 110 GHz