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Formation and evolution of F nanobubbles in amorphous and crystalline Si
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10.1063/1.2969055
/content/aip/journal/apl/93/6/10.1063/1.2969055
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/6/10.1063/1.2969055
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Figures

Image of FIG. 1.
FIG. 1.

SIMS concentration profile overlapped with TEM cross-sectional view of samples implanted with F and partially regrown by SPE at for (a) 25 s and (b) 70 s. In (c) the fully regrown sample, after 100 s annealing, is reported. In (a) and (b), the arrows point to some bubbles. The different contrast shown by bubbles in (a) and (b) with respect to (c) depends by the different over- and under-focus imaging conditions used.

Image of FIG. 2.
FIG. 2.

Plan view images of the (a) sample completely regrown by SPE (, 100 s) and for post-SPE samples further annealed for 900 s at (b) and (c) . In (b) few elongated bubbles are indicated by circles.

Image of FIG. 3.
FIG. 3.

Behavior of total volume occupied by bubbles per defect band volume (right vertical axis) and dose of incorporated F (left vertical axis) as a function of the post-SPE annealing temperature.

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/content/aip/journal/apl/93/6/10.1063/1.2969055
2008-08-13
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation and evolution of F nanobubbles in amorphous and crystalline Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/6/10.1063/1.2969055
10.1063/1.2969055
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