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SIMS concentration profile overlapped with TEM cross-sectional view of samples implanted with F and partially regrown by SPE at for (a) 25 s and (b) 70 s. In (c) the fully regrown sample, after 100 s annealing, is reported. In (a) and (b), the arrows point to some bubbles. The different contrast shown by bubbles in (a) and (b) with respect to (c) depends by the different over- and under-focus imaging conditions used.
Plan view images of the (a) sample completely regrown by SPE (, 100 s) and for post-SPE samples further annealed for 900 s at (b) and (c) . In (b) few elongated bubbles are indicated by circles.
Behavior of total volume occupied by bubbles per defect band volume (right vertical axis) and dose of incorporated F (left vertical axis) as a function of the post-SPE annealing temperature.
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