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Schematic of the Chi Kung reactor showing the helicon double layer plasma source and the diffusion chamber with diagnostic (DogLeg RFEA). Inserted through the backplate, the DogLeg RFEA is rotated through 90° in 5° intervals.
Contour plot of the ion beam density measured with the RFEA at the beam potential . The magnetic field lines are obtained from simulation which agrees with experimental measurements.9 The operating conditions are rf power, argon pressure and a magnetic field diverging from at at .16 The vertical axis is plotted from , the negative radius has been artificially introduced to indicate opposite sides of the reactor axis.
The beam ion density profile for various axial positions. Similar to Fig. 2, the radial axis contains artifical negative values.
Divergence angles calculated from the integration percentages , 85%, and 95% of each slice. The magnetic field lines that pass through the beam edge best-fit point at are shown as solid lines. The divergence angle , measured from the reactor axis to each integrated beam edge, is shown for an integrated percentage of 85%.
The crosses show the divergence angles as a function of integrated percentage . The solid line is the quadratic line of best fit. The inferred 100% point is plotted as the circle.
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