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Relative radical densities and ratios of in single-frequency plasmas. (a) , (b) F, (c) H, and (d) .
Relative radical densities and ratios of in dual-frequency plasmas. (a) , (b) F, (c) H, and (d) .
Mass spectrum for ionization of by electron impact at 70 eV. The background contributions have been subtracted. (a) Before discharges and (b) discharge with 27/2 MHz.
The relative intensity ratio of obtained from the mass spectrum. (a) In single-frequency plasmas and (b) in dual-frequency plasmas.
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