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The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma
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10.1063/1.2972117
/content/aip/journal/apl/93/8/10.1063/1.2972117
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/8/10.1063/1.2972117
/content/aip/journal/apl/93/8/10.1063/1.2972117
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/content/aip/journal/apl/93/8/10.1063/1.2972117
2008-08-25
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/8/10.1063/1.2972117
10.1063/1.2972117
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