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Electrical characteristics and conduction mechanisms of metal-insulator-metal capacitors with nanolaminated dielectrics
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10.1063/1.2969399
/content/aip/journal/apl/93/9/10.1063/1.2969399
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/9/10.1063/1.2969399
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cumulative distributions of breakdown electric fields for the MIM capacitors with various nanolaminates as well as pure at , together with the deduced CET values of various insulators. The acronym of IL, H, and A denotes individual layer, , and , respectively.

Image of FIG. 2.
FIG. 2.

Cross-sectional HRTEM images of the MIM capacitors with different nanolaminated insulators consisting of (a) and , (b) , and . The insets show general views of the MIM capacitors. In image (b), the white and black ellipses show amorphous and crystalline regions, respectively.

Image of FIG. 3.
FIG. 3.

(a) Cumulative distributions of breakdown electric fields at for insulators consisting of three layers and two layers (denoted by A-H) and two layers and one layer (denoted by A/H/A), respectively, reflected by the inserted schematic diagram. (b) The corresponding leakage current densities as a function of voltage at 23 and , respectively.

Image of FIG. 4.
FIG. 4.

(a) characteristics of the MIM capacitor for nanolaminate with ILs against different measurement temperature . (b) Plotting of vs of .

Image of FIG. 5.
FIG. 5.

Plotting of vs under different electric fields, revealing a linear relationship between and . The inset shows plotting of the potential well depth against electric field.

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/content/aip/journal/apl/93/9/10.1063/1.2969399
2008-09-05
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical characteristics and conduction mechanisms of metal-insulator-metal capacitors with nanolaminated Al2O3–HfO2 dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/9/10.1063/1.2969399
10.1063/1.2969399
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