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Cumulative distributions of breakdown electric fields for the MIM capacitors with various nanolaminates as well as pure at , together with the deduced CET values of various insulators. The acronym of IL, H, and A denotes individual layer, , and , respectively.
Cross-sectional HRTEM images of the MIM capacitors with different nanolaminated insulators consisting of (a) and , (b) , and . The insets show general views of the MIM capacitors. In image (b), the white and black ellipses show amorphous and crystalline regions, respectively.
(a) Cumulative distributions of breakdown electric fields at for insulators consisting of three layers and two layers (denoted by A-H) and two layers and one layer (denoted by A/H/A), respectively, reflected by the inserted schematic diagram. (b) The corresponding leakage current densities as a function of voltage at 23 and , respectively.
(a) characteristics of the MIM capacitor for nanolaminate with ILs against different measurement temperature . (b) Plotting of vs of .
Plotting of vs under different electric fields, revealing a linear relationship between and . The inset shows plotting of the potential well depth against electric field.
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