1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Solid phase epitaxy of amorphous Ge on Si in atmosphere
Rent:
Rent this article for
USD
10.1063/1.3098075
/content/aip/journal/apl/94/11/10.1063/1.3098075
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/11/10.1063/1.3098075

Figures

Image of FIG. 1.
FIG. 1.

XRD scan of 100 nm crystallized amorphous Ge on Si(111). An intense and narrow Ge (111) diffraction peak is observed, indicating high crystal quality. The presence of fringes indicates a smooth Ge surface and interface between Ge and Si.

Image of FIG. 2.
FIG. 2.

XRD scan of 100 nm crystallized amorphous Ge on Si(001). A Ge (004) diffraction peak is observed, which is less intense and broader than the Ge (111) peak on Si(111). This indicates that crystallization on Si(001) leads to less good crystal quality than on Si(111).

Image of FIG. 3.
FIG. 3.

XRD phi scans of skew-symmetric reflections of Ge (202) and Si (202) from 100 nm Ge on Si(111). The Ge and Si scans are overlaid. The Si diffraction peaks are repeated every 120°, whereas the Ge diffraction peaks are repeated every 60°. The Ge diffraction peaks in between the Si diffraction peaks indicate the presence of Ge twins.

Tables

Generic image for table
Table I.

Comparison of charge mobility for 90 nm crystallized Ge on Si(111) and bulk Ge(001) (Ref. 20) and Si(001) (Ref. 21) for electron and hole concentrations of, respectively, and .

Loading

Article metrics loading...

/content/aip/journal/apl/94/11/10.1063/1.3098075
2009-03-20
2014-04-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Solid phase epitaxy of amorphous Ge on Si in N2 atmosphere
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/11/10.1063/1.3098075
10.1063/1.3098075
SEARCH_EXPAND_ITEM