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Tomographic study of atomic-scale redistribution of platinum during the silicidation of thin films
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10.1063/1.3099970
/content/aip/journal/apl/94/11/10.1063/1.3099970
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/11/10.1063/1.3099970
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram illustrating the thin-film structure before and after RTA at for 5 s. The color red indicates the GBs and shows the columnar nature of the grains with the long axis oriented normal to the thin film’s surface.

Image of FIG. 2.
FIG. 2.

Two-dimensional (2D) top-view projection along the analysis direction of a full 3D reconstruction of 3D atom-probe tomographic data displaying the distribution of elements. Nickel, Si, and Pt atoms are shown in green, blue, and red, respectively. An analysis volume of is displayed from the silicide region of the complete reconstruction. Only 25% of the Ni and Si atoms are displayed for clarity.

Image of FIG. 3.
FIG. 3.

(a) 2D vertical slice along the analysis direction of 3D LEAP tomographic data at a depth of . An analysis volume of is displayed using the same coloring scheme for atoms (Fig. 2). Only 10% of Ni and Si atoms are displayed for clarity. (b) 1D composition profile of Pt and Ni atoms within the cylindrical volume element placed horizontally across three GBs of the grains as displayed in (a).

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/content/aip/journal/apl/94/11/10.1063/1.3099970
2009-03-16
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tomographic study of atomic-scale redistribution of platinum during the silicidation of Ni0.95Pt0.05/Si(100) thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/11/10.1063/1.3099970
10.1063/1.3099970
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