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SEM image of PMnN-PZT film: (a) surface and (b) cross section.
XRD spectrum: (a) PZT film and (b) PMnN-PZT film.
Ferroelectricity measured at 1 kHz: (a) hysteretic loop and (b) relative dielectric constant change with temperature.
Piezoelectric response of film/substrate cantilever measured at (a) 500 Hz and 1 kHz. (b) Resonance frequency .
Structure of PZT-based material.
Characterization of PZT-based film.
Parameter of film/substrate cantilever.
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