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Scaling of the surface migration length in nanoscale patterned growth
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10.1063/1.3117366
/content/aip/journal/apl/94/15/10.1063/1.3117366
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/15/10.1063/1.3117366

Figures

Image of FIG. 1.
FIG. 1.

(a) A schematic illustration of a disk of diameter fabricated on a GaAs substrate. (b) A plot of vs of Eq. (2) for three different ’s. (c) A plot of vs for . The dashed line indicates from (a) for . (d) A plot of vs obtained from (b) with the approximation of Eq. (2).

Image of FIG. 2.
FIG. 2.

Top-view SEM images of the as-grown sample at having (a) of infinity (no pattern), (b) , (c) , (d) , (e) , and (f) . In (f), the alignment and shape of masks are slightly degraded because of the fluctuation of dry etching at such small scales. It should be noted that the periodic circular shapes in (e) and (f) are , while those in (b) through (d) are GaAs.

Image of FIG. 3.
FIG. 3.

A plot of vs from Table I with (square) and 6 (circle). For each measured at given , the corresponding Ga flux in Table I becomes . In the plot, the median for each in Table I was used.

Tables

Generic image for table
Table I.

Summary of NPG conditions.

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/content/aip/journal/apl/94/15/10.1063/1.3117366
2009-04-16
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scaling of the surface migration length in nanoscale patterned growth
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/15/10.1063/1.3117366
10.1063/1.3117366
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