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Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies
7.A. K. Azad
, H. -T. Chen
, A. J. Taylor
, E. Akhadov
, N. R. Weisse-Bernstein
, and J. F. O’Hara
8.N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, Opt. Lett. 30, 1348 (2005).
11.M. C. Martin, Z. Hao, A. Liddle, E. H. Anderson, W. J. Padilla, D. Schurig, and D. R. Smith, Conference Proceedings of IEEE IRMMW-THz 2005 (unpublished).
15.X. G. Peralta, C. L. Arrington, J. D. Williams, A. Strikwerda, R. D. Averitt, W. J. Padilla, J. O’Hara, and I. Brener, Proceedings of MRS Spring Meeting, San Francisco, CA, 24–28 March 2008 (unpublished).
CST MICROWAVE STUDIO 2008
, Computer Simulation Technology, Wellesley Hills, MA, (www.cst.com
19.J. F. O’Hara, E. Smirnova, H. -T. Chen, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, J. Nanoelectron. Optoelectron. 2, 90 (2007).
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A possible path for fabricating three-dimensional metamaterials with curved geometries at optical and infrared frequencies is to stack flexible metamaterial layers. We have fabricated highly uniform metamaterials at terahertz frequencies on large-area, low-stress, free-standing thick silicon nitride membranes. Their response remains comparable to that of similar structures on thick substrates as measured by the quality factor of the resonances. Transmission measurements with a Fourier transform infrared spectrometer highlight the advantage of fabricating high frequency metamaterials on thin membranes as etalon effects are eliminated. Releasing the membranes enables layering schemes and placement onto curved surfaces in order to create three-dimensional structures.
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