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Detection of Ga suboxides and their impact on III-V passivation and Fermi-level pinning
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10.1063/1.3120546
/content/aip/journal/apl/94/16/10.1063/1.3120546
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3120546
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Ga XPS spectrum for an As capped substrate following thermal desorption of the As cap. An oxygen and carbon free surface is produced allowing precise measurement of the position (1116.7 eV) and FWHM of the bulk peak. All XPS fits included a Shirley background subtraction. (b) Ga XPS spectrum of an substrate following decapping and deposition.

Image of FIG. 2.
FIG. 2.

(a) Ga XPS spectrum for a treated GaAs substrate highlighting the location of the oxidation state. A small interfacial surface oxide is also present. (b) Ga core-level XPS spectrum of an substrate following decapping and e-beam evaporation of amorphous Si.

Image of FIG. 3.
FIG. 3.

(a) Ga XPS spectrum of ALD deposited on a HF-last treated GaAs surface. The presence of and oxidation states are both detected. (b) curves from devices with the same interface as the sample from (a). (c) measurements performed at (100 Hz curves were removed due to equipment-induced noise).

Image of FIG. 4.
FIG. 4.

(a) Ga XPS spectrum of HF-last GaAs with ex situ deposited PECVD amorphous Si followed by ALD deposition. The Si deposition removes the oxidation state while the oxidation state remains. (b) curves from devices with the same interface as the sample from (a). (c) measurements performed at . The frequency dispersion has been greatly reduced, demonstrating the correlation between the oxidation state and interface traps that pin the Fermi level for these systems.

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/content/aip/journal/apl/94/16/10.1063/1.3120546
2009-04-20
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Detection of Ga suboxides and their impact on III-V passivation and Fermi-level pinning
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3120546
10.1063/1.3120546
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