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Stress field analysis to understand the breakdown characteristics of stacked high- dielectrics
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10.1063/1.3122924
/content/aip/journal/apl/94/16/10.1063/1.3122924
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3122924
/content/aip/journal/apl/94/16/10.1063/1.3122924
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/content/aip/journal/apl/94/16/10.1063/1.3122924
2009-04-23
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress field analysis to understand the breakdown characteristics of stacked high-k dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3122924
10.1063/1.3122924
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