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Unified theory of gas damping of flexible microcantilevers at low ambient pressures
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10.1063/1.3122933
/content/aip/journal/apl/94/16/10.1063/1.3122933
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3122933
/content/aip/journal/apl/94/16/10.1063/1.3122933
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/content/aip/journal/apl/94/16/10.1063/1.3122933
2009-04-24
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Unified theory of gas damping of flexible microcantilevers at low ambient pressures
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/16/10.1063/1.3122933
10.1063/1.3122933
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