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(a) Schematic of the double-groove Fabry–Pérot cavity in a gold surface. (b) Cross-section SEM image of the double groove structure. The grooves were filled with platinum and then a box was structured to allow side view. (c) SEM top-view of the double groove structure. indicates the center-to-center groove spacing.
CL line scans (30 keV electron beam) over a double groove structure ( and ) for wavelengths of 650 nm (black symbols), 765 nm (red symbols), and 840 nm (blue symbols). The grooves are located at 0 and . The curves are shifted by 0.05 (765 nm) and 1.0 (840 nm) for clarity.
CL as a function of position and wavelength for line scans across three SPP Fabry–Pérot resonators with different center-to-center groove separation (, 2000, and 3000 nm). Multimode spectra with are observed.
Quality factor for groove resonators for the resonance at 690 nm as a function of groove depth, extracted from CL line scans (symbols). The black line shows the quality factor calculated from the theoretical groove reflectivity and cavity losses. The inset shows the resonance spectra at 640, 690, 765, 870, and 980 nm derived from CL data for a resonator with 100 nm deep grooves (, last panel in Fig. 3).
Reflection coefficient for SPPs at a single 100 nm wide groove in gold as a function of groove depth and SPP wavelength, as determined from FDTD calculations.
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