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Low temperature thermal transport in partially perforated silicon nitride membranes
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10.1063/1.3127232
/content/aip/journal/apl/94/18/10.1063/1.3127232
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/18/10.1063/1.3127232
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Optical microscope image of an absorber coupled TES bolometer.

Image of FIG. 2.
FIG. 2.

Thermal conductance for samples with different depth of trenches vs bath temperature.

Image of FIG. 3.
FIG. 3.

Summarized dependence of thermal conductance for all tested samples at 0.5 K. The inset shows separately estimated at this temperature, and an atomic force microscope image of the trenched portion of membrane.

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/content/aip/journal/apl/94/18/10.1063/1.3127232
2009-05-06
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature thermal transport in partially perforated silicon nitride membranes
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/18/10.1063/1.3127232
10.1063/1.3127232
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