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Schematic of the experimental setup.
Plot of the time variation of the BCl density in the afterglow of plasma at 800 W/5 mTorr and for various percentages in the gas mixture. The plasma is switched off at time 0. The solid lines correspond to exponential decay fits of the data.
Loss rate of BCl radicals deduced from the fit in Fig. 2 as a function of the average density in the afterglow. The solid line is a linear fit of the data.
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