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Wafer-bonded single-crystal silicon slot waveguides and ring resonators
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10.1063/1.3070541
/content/aip/journal/apl/94/2/10.1063/1.3070541
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3070541
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Cross-sectional TEM micrographs of the fabricated structure, showing all layers (inset) and a higher magnification image of the bonded slot region. (b) A schematic of the fabrication process flow.

Image of FIG. 2.
FIG. 2.

The as-fabricated waveguide geometry shown with the calculated power distribution in the guided TE-like and TM-like modes at 1550 nm.

Image of FIG. 3.
FIG. 3.

(a) The ring resonator device layout and SEM images of (b) a grating coupler and (c) the coupling region between a drop port and a ring (with a higher magnification image of the ring waveguide).

Image of FIG. 4.
FIG. 4.

(a) Through- and drop-port response of a single ring resonator at both the TE and TM coupling angles. The TM mode response curves are offset for clarity. (b) Lorentzian fits of a through-port resonance for each mode.

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/content/aip/journal/apl/94/2/10.1063/1.3070541
2009-01-13
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Wafer-bonded single-crystal silicon slot waveguides and ring resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3070541
10.1063/1.3070541
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