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(a) Cross-sectional TEM micrographs of the fabricated structure, showing all layers (inset) and a higher magnification image of the bonded slot region. (b) A schematic of the fabrication process flow.
The as-fabricated waveguide geometry shown with the calculated power distribution in the guided TE-like and TM-like modes at 1550 nm.
(a) The ring resonator device layout and SEM images of (b) a grating coupler and (c) the coupling region between a drop port and a ring (with a higher magnification image of the ring waveguide).
(a) Through- and drop-port response of a single ring resonator at both the TE and TM coupling angles. The TM mode response curves are offset for clarity. (b) Lorentzian fits of a through-port resonance for each mode.
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