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Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves
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10.1063/1.3072364
/content/aip/journal/apl/94/2/10.1063/1.3072364
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3072364

Figures

Image of FIG. 1.
FIG. 1.

Axial profile of (solid squares) and (open circles) for a 50 mTorr plasma, determined by TRG-OES using the two combination of Ar, Kr, and Xe lines given in Table I.

Image of FIG. 2.
FIG. 2.

Segmented EEDF constructed from the values of and . The conditions are the same as in Fig. 1.

Tables

Generic image for table
Table I.

Emission lines used in and measurements. and columns contain the fractional contribution to emission coming from the ground state, determined from the model for .

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/content/aip/journal/apl/94/2/10.1063/1.3072364
2009-01-14
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3072364
10.1063/1.3072364
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