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Axial profile of (solid squares) and (open circles) for a 50 mTorr plasma, determined by TRG-OES using the two combination of Ar, Kr, and Xe lines given in Table I.
Segmented EEDF constructed from the values of and . The conditions are the same as in Fig. 1.
Emission lines used in and measurements. and columns contain the fractional contribution to emission coming from the ground state, determined from the model for .
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