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Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves
2.E. Stamate, S. Nakao, and H. Sugai, Thin Solid Films 506–507, 701 (2006).
3.M. Aramaki, J. Kobayashi, A. Kono, E. Stamate, and H. Sugai, Thin Solid Films 506–507, 679 (2006).
19.M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
20.The critical density for surface-wave propagation is given by , where is the discharge tube relative permittivity (3.78 for quartz) and is the wave frequency (2.45 GHz).
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