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Influence of nitrogen doping on growth rate and texture evolution of chemical vapor deposition diamond films
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10.1063/1.3072601
/content/aip/journal/apl/94/2/10.1063/1.3072601
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3072601

Figures

Image of FIG. 1.
FIG. 1.

{111} pole figure of the NSs (interfaces to substrate, NS) and free GSs of the four samples with different ratios (CS: cross section).

Image of FIG. 2.
FIG. 2.

Orientation maps and EBSD-based ODF sections at of the four sample: 0.5%, 1.5%, 2.5%, and 3.5% . Orientation maps are color coded for the axis parallel to the growth direction.

Image of FIG. 3.
FIG. 3.

Distribution of the grain shape aspect ratios in the four diamond samples. The black columns below 0.25 correspond to all grains that are highlighted in black in the inverse pole figure maps (compared to Fig. 2). The fraction of the {110}-oriented grains relative to all black grains (characterized by a long aspect ratio) reaches from 23.7% to 73.9% (orientation scatter 15°). Grains on the edge of the map were considered as regular crystals and included in the analysis.

Tables

Generic image for table
Table I.

(1) Growth rate, (2) fraction of {110} fiber texture and scatter width measured in the GS by XRD, and (3) fraction of {110} and {001} fiber texture and average grain diameter measured in cross sections by EBSD.

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/content/aip/journal/apl/94/2/10.1063/1.3072601
2009-01-16
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of nitrogen doping on growth rate and texture evolution of chemical vapor deposition diamond films
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/2/10.1063/1.3072601
10.1063/1.3072601
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