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(a) Top view, (b) side view, and (c) cross-section view of lateral PCM with SLL structure and ternary alloy phase diagram.
(a) Program window of SLL lateral PCM as a function of Set pulse current varied with different thickness ratio. (b) Smallest Set and RESET currents of SLL lateral PCM dependence on thickness ratio. For both RESET and Set, the pulse width was fixed at 30 ns.
(a) Endurance as a function of different thickness ratio with Set pulse 120 ns with current amplitude 0.38 mA and RESET pulse 30 ns with current amplitude 2.2 mA. (b) Endurance of lateral PCM with thickness ratio 1.6 with Set pulse 30 ns with current amplitude 1.16 mA and RESET pulse 30 ns with current amplitude 2.2 mA.
Resistance dependent on temperature for different ratio of SLL structure. The exothermal measurement (ETTM) was carried out at the heating rate of .
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