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Experiment setup of the five-beam interference with one beam modulated by a glass slide. Inset: phase modulation as a function of the glass slide rotational angle .
Isosurface of the unit cells of the phase modulated five-beam interference pattern, . The phase change varies from 0 to with increment.
SEM pictures of fabricated structures in the photoresist through the five-beam interference without a phase modulation. Insets are the zoom in view of the bottom layer and a simulation for a comparison.
(Color Online) (a) SEM pictures for the photoresist templates of the interconnecting diamondlike structure, produced by the five-beam interference with phase retardation. (b) Computed five-beam interference pattern and its selected cross-section planes along height direction; [(c)–(f)] Structure variation described by the zoom in SEM views of the diamondlike template and their corresponding simulation planes from (b).
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