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Phase tunable holographic fabrication for three-dimensional photonic crystal templates by using a single optical element
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10.1063/1.3149705
/content/aip/journal/apl/94/23/10.1063/1.3149705
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/23/10.1063/1.3149705
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experiment setup of the five-beam interference with one beam modulated by a glass slide. Inset: phase modulation as a function of the glass slide rotational angle .

Image of FIG. 2.
FIG. 2.

Isosurface of the unit cells of the phase modulated five-beam interference pattern, . The phase change varies from 0 to with increment.

Image of FIG. 3.
FIG. 3.

SEM pictures of fabricated structures in the photoresist through the five-beam interference without a phase modulation. Insets are the zoom in view of the bottom layer and a simulation for a comparison.

Image of FIG. 4.
FIG. 4.

(Color Online) (a) SEM pictures for the photoresist templates of the interconnecting diamondlike structure, produced by the five-beam interference with phase retardation. (b) Computed five-beam interference pattern and its selected cross-section planes along height direction; [(c)–(f)] Structure variation described by the zoom in SEM views of the diamondlike template and their corresponding simulation planes from (b).

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/content/aip/journal/apl/94/23/10.1063/1.3149705
2009-06-10
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phase tunable holographic fabrication for three-dimensional photonic crystal templates by using a single optical element
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/23/10.1063/1.3149705
10.1063/1.3149705
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