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Quadratic coefficient as a function of capacitance density for different materials of the literature. The figure of merit is expressed in . The shaded area represents long term (2016) ITRS requirements (Ref. 12).
Normalized capacitance vs bias for a 20 nm STO layer (as-deposited, annealed in air at , and annealed in air at ).
Normalized capacitance vs bias for stacks. The stacks make use of STO annealed at (upper curves) or at (lower curves). Best performances are obtained with .
Capacitance density, experimental quadratic coefficient, and theoretical quadratic coefficient calculated from Eq. (1), where , (this work), , (Ref. 10), and leakage current of capacitors. STO was postannealed in air at during 1 h.
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