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Phase identification of self-forming Cu–Mn based diffusion barriers on and dielectrics using x-ray absorption fine structure
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10.1063/1.3068500
/content/aip/journal/apl/94/4/10.1063/1.3068500
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/4/10.1063/1.3068500
/content/aip/journal/apl/94/4/10.1063/1.3068500
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/content/aip/journal/apl/94/4/10.1063/1.3068500
2009-01-30
2014-08-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phase identification of self-forming Cu–Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structure
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/4/10.1063/1.3068500
10.1063/1.3068500
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