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[(a)–(c)] UVPL images of BPDs, (d) 3D schematic of BPD spanning full epi, and (e) 3D schematic of BPD that turns into TED at interrupt. Image (a) is after the initial growth, (b) is after an ex situ interrupt and subsequent growth, sample 427 in Table I, and (c) is an overlay of (a) and (b). T and C are the labels for turned and continuing BPDs, respectively.
UVPL image of in situ sample 914 showing two BPDs that are converted to TEDs and three BPDs that continue through the whole epitaxial thickness.
Temperature, propane flow, and duration of the ex situ and in situ interrupts with BPD conversion results. Ex situ interrupts are at room temperature (RT).
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