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Enhanced resolution and high aspect-ratio semiconductor nanopatterning by metal overcoating
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10.1063/1.3080207
/content/aip/journal/apl/94/6/10.1063/1.3080207
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3080207
/content/aip/journal/apl/94/6/10.1063/1.3080207
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/content/aip/journal/apl/94/6/10.1063/1.3080207
2009-02-09
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced resolution and high aspect-ratio semiconductor nanopatterning by metal overcoating
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3080207
10.1063/1.3080207
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