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RA dependence of TMR ratio with capping layer materials as a parameter. MTJs were annealed at for .
Annealing temperature dependence of MR ratio with capping layer materials as a parameter. The MR ratio at RA of was interpolated from the relationship between RA and MR ratio.
Depth profile of MTJs with (a) Ta, (b) Ru, (c) Cu, and (d) Ti capping layer after and before annealing at 270, 320, and . The solid line, dotted line, dashed line, and circle indicate boron, cobalt, capping layer material, and Mg, respectively. Intensity of each material is normalized by maximum intensity of as-deposited sample.
Cross-sectional TEM images of MTJs with (a) Ta and (b) Ti capping layer. MTJs were annealed at for .
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