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Aluminum gettering of iron in silicon as a problem of the ternary phase diagram
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10.1063/1.3080666
/content/aip/journal/apl/94/6/10.1063/1.3080666
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3080666
/content/aip/journal/apl/94/6/10.1063/1.3080666
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/content/aip/journal/apl/94/6/10.1063/1.3080666
2009-02-11
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Aluminum gettering of iron in silicon as a problem of the ternary phase diagram
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3080666
10.1063/1.3080666
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