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Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy
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10.1063/1.3081034
/content/aip/journal/apl/94/6/10.1063/1.3081034
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3081034
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) The evolution of the LEIS spectrum during annealing at . (b) Partial 3 keV LEIS spectra of samples with 4, 5, and 7 nm Si. The location of the Mo surface peak is indicated.

Image of FIG. 2.
FIG. 2.

The evolution of the LEIS spectrum of the sample (10 nm Mo/5 nm Si) during annealing at .

Image of FIG. 3.
FIG. 3.

plotted as a function of . The lines represent the best linear fit for the corresponding part of the graph and the slope represents .

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/content/aip/journal/apl/94/6/10.1063/1.3081034
2009-02-10
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/6/10.1063/1.3081034
10.1063/1.3081034
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