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Triple Shockley type stacking faults in epilayers
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10.1063/1.3095508
/content/aip/journal/apl/94/9/10.1063/1.3095508
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/9/10.1063/1.3095508
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

PL spectra of with and without the SFs. Inset shows the monochromatic micro-PL mapping at wavelength of 480 nm.

Image of FIG. 2.
FIG. 2.

Micrograph of the sample surface after KOH etching. Round-shaped pits represent threading edge dislocations. Oval-shaped pits represent basal plane dislocations.

Image of FIG. 3.
FIG. 3.

(a) Bright-field TEM image and (b) high-resolution lattice image of a cross section of epilayer with a SF.

Image of FIG. 4.
FIG. 4.

Schematic of the stacking sequences of the Shockley type SFs viewed from the direction. Stacking sequences are illustrated in terms of the and Zhdanov’s notations.

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/content/aip/journal/apl/94/9/10.1063/1.3095508
2009-03-06
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Triple Shockley type stacking faults in 4H-SiC epilayers
http://aip.metastore.ingenta.com/content/aip/journal/apl/94/9/10.1063/1.3095508
10.1063/1.3095508
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