Full text loading...
(a) TG and DTA curves of IGZO sol (TG: red, DTA: blue). (b) XRD pattern of a 50 nm thick IGZO film on a Si substrate covered with a 100 nm thick layer and SEM images of the film surfaces of (c) sol-gel ZnO and (d) sol-gel IGZO.
A bright-field STEM image of an (a) IGZO film and chemical composition maps for (b) In, (c) Ga, and (d) Zn.
Device performance for IGZO films with various Ga ratios. (a) Transfer curves ( at a fixed drain voltage of 10 V) for TFTs with IGZO active layers with the Ga ratio ranging from 0.1 to 1. (b) Output curve for the IGZO film with the 0.5 Ga ratio.
Device performance for TFT with an IGZO active layer sintered at : (a) transfer curve and (b) output curve . The Ga ratio for this sample was 0.5.
Article metrics loading...