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Analysis of the electric field induced elemental separation of by transmission electron microscopy
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View: Figures


Image of FIG. 1.
FIG. 1.

The test structure of the GST pattern. Inset is a scanning electron micrograph of the GST pattern. On the right side is an optical image of the TEM sample (backside).

Image of FIG. 2.
FIG. 2.

Images of the uncapped pattern after voltage pulsing. (a) The BF image. (b) The HAADF image. The inset shows the selected area diffraction pattern obtained at the central path. Peaks circled red are from hexagonal {106} planes and rings are from the background cubic phase. (c) EDS mapping results of the regions indicated as yellow in (b). The raw signals taken from peaks were normalized against the total GST signal, thus displaying the relative abundance of each element.

Image of FIG. 3.
FIG. 3.

Images of the capped pattern after voltage sweeping. (a) The HAADF image. (b) Normalized EDS mapping results of the regions indicated as yellow in (a). Mass depleted regions were blackened out in the individual elemental maps.

Image of FIG. 4.
FIG. 4.

The liquidus projection of the Ge–Sb–Te ternary phase diagram (Ref. 12). The arrows on the boundary lines indicate temperature declining. The pseudobinary line (dashed) is the local hilltop of the plane, isolating the two liquid phases and . Blue arrows indicate corresponding primary phase fields and red arrows indicate local liquidus temperatures. The inset (green) is the isothermal section at (Ref. 13).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of the electric field induced elemental separation of Ge2Sb2Te5 by transmission electron microscopy