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Phase change behavior in oxygen-incorporated films
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10.1063/1.3168551
/content/aip/journal/apl/95/1/10.1063/1.3168551
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/1/10.1063/1.3168551

Figures

Image of FIG. 1.
FIG. 1.

Plot of sheet resistance as a function of annealing temperature. With oxygen-incorporated GST films, undoped GST film was measured as a reference.

Image of FIG. 2.
FIG. 2.

XRD patterns of (a) undoped GST film, (b) 16.7%, (c) 21.7%, and (d) 30.8% oxygen-incorporated GST films. fcc (f), GST hexagonal (225 h) and hexagonal (124 h) phases are indicated by black characters with Miller indices. hexagonal and hexagonal phases are indicated by red and blue characters, respectively.

Image of FIG. 3.
FIG. 3.

(a) The -weighted edge EXAFS data for 16.7% oxygen-incorporated GST films. (b) Interatomic distance for oxygen-incorporated GST films. (c) XPS Ge core level spectra for oxygen-incorporated GST films. The red line indicates the peak position for phase.

Image of FIG. 4.
FIG. 4.

(a) Raman spectra for 30.8% and undoped GST films. Red circles indicate peaks for and the box indicates the peak for . AFM images of (b) 16.7% and (c) 30.8% oxygen-incorporated GST films after an annealing treatment at .

Tables

Generic image for table
Table I.

Interatomic distance and coordination data for as-grown oxygen-incorporated GST films.

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/content/aip/journal/apl/95/1/10.1063/1.3168551
2009-07-06
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phase change behavior in oxygen-incorporated Ge2Sb2Te5 films
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/1/10.1063/1.3168551
10.1063/1.3168551
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