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Origin of frequency-dependent line edge roughness: Monte Carlo and fast Fourier-transform studies
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10.1063/1.3225149
/content/aip/journal/apl/95/10/10.1063/1.3225149
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/10/10.1063/1.3225149
/content/aip/journal/apl/95/10/10.1063/1.3225149
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/content/aip/journal/apl/95/10/10.1063/1.3225149
2009-09-09
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Origin of frequency-dependent line edge roughness: Monte Carlo and fast Fourier-transform studies
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/10/10.1063/1.3225149
10.1063/1.3225149
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