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Minimum LER as a function of the quencher concentration, obtained by the simulation. The exposed linewidth and developed linewidth were 10 and 20 nm, respectively.
Examples of developed patterns for each exposure dose (5, 20, and aligned in row) and quencher concentration (aligned in columns; 0.001, 0.0025, 0.025, and 0.4 wt % for , 0.004, 0.01, 0.1, and 1.6 wt % for ; and 0.02, 0.05, 0.5, and 8 wt % for ). Thus, the quencher concentrations relative to the exposure dose are the same in the same column.
Power spectra of the frequency-dependent LER at obtained by FFT. The quencher concentrations are identified by the different types of line. The arrow indicates an increase in the quencher concentration.
Correlations for (a) low-frequency and (b) high-frequency components with the total LER value. The squares, triangles, and circles correspond to 5, 20, and exposure doses, respectively. The closed and open symbols represent high and low quencher concentrations.
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