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Effects of film dimension on the phase transformation behavior of NiTi thin films
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10.1063/1.3226104
/content/aip/journal/apl/95/10/10.1063/1.3226104
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/10/10.1063/1.3226104

Figures

Image of FIG. 1.
FIG. 1.

(a) The x-ray diffraction patterns of a continuous film and lithographically produced NiTi micron-scale lines, annealed at for 20 min (the inset is a scan from a general area detector diffraction system) (b) the grain size distribution with corresponding TEM image (inset) for the films and (c) for lines.

Image of FIG. 2.
FIG. 2.

(a) The surface morphology of continuous sputter-deposited NiTi films and (b) lithographically produced NiTi micron-scale lines as viewed by SEM. The associated surface profiles measured by AFM are inset in each.

Image of FIG. 3.
FIG. 3.

The volume average stress as a function of temperature for a continuous film and micron-lines measured parallel and perpendicular to their length.

Tables

Generic image for table
Table I.

The transformation temperatures, hysteresis, and interval for continuous films and patterned lines.

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/content/aip/journal/apl/95/10/10.1063/1.3226104
2009-09-08
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of film dimension on the phase transformation behavior of NiTi thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/10/10.1063/1.3226104
10.1063/1.3226104
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