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AFM images of samples A–E. The vertical scan range is 5 nm and the in-plane directions are also indicated.
SIMS depth profile of ZnO doped with As/Zn gas phase ratio of 2.0%.
XPS depth-profiled core-level spectra of and , (a) the as-grown surface, and the surface etched by ion sputtering for (b) 1 min and (c) 6 min.
The structural properties by AFM and HRXRD measurements.
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