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Metal-insulator-metal capacitor with high capacitance density and low leakage current using film
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10.1063/1.3222895
/content/aip/journal/apl/95/11/10.1063/1.3222895
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/11/10.1063/1.3222895
/content/aip/journal/apl/95/11/10.1063/1.3222895
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/content/aip/journal/apl/95/11/10.1063/1.3222895
2009-09-16
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Metal-insulator-metal capacitor with high capacitance density and low leakage current using ZrTiO4 film
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/11/10.1063/1.3222895
10.1063/1.3222895
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