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Excitation, detection, and passive cooling of a micromechanical cantilever using near-field of a microwave resonator
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10.1063/1.3224912
/content/aip/journal/apl/95/11/10.1063/1.3224912
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/11/10.1063/1.3224912
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic circuit diagram of room temperature microwave near-field system including dual microwave and optical excitation and readout techniques. (b) Photo of overall system inside vacuum chamber mounted on antivibration table.

Image of FIG. 2.
FIG. 2.

Amplitude vs frequency plot. Full line is a least-squares Lorentzian fit to the amplitude vs frequency data. Inset is a Scanning Electron Microscope (SEM) image of one Si cantilever resonator.

Image of FIG. 3.
FIG. 3.

Experimental confirmation of distance dependence of microwave near-field force on cantilever. Open circles are experimental data and solid line is the fit to Eq. (2) (see Ref. 6).

Image of FIG. 4.
FIG. 4.

Cantilever resonance frequency as a function of microwave frequency at a range of power levels.

Image of FIG. 5.
FIG. 5.

Experimental results on cantilever passive cooling by microwaves. (a) Plot of the cantilever frequency shift from 10.3055 kHz (filled squares) and damping rate (open circles) for the cantilever resonance as a function of microwave drive frequency at fixed drive power. (b) Effective temperature vs microwave frequency.

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/content/aip/journal/apl/95/11/10.1063/1.3224912
2009-09-16
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Excitation, detection, and passive cooling of a micromechanical cantilever using near-field of a microwave resonator
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/11/10.1063/1.3224912
10.1063/1.3224912
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