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(a) Fabrication sequence of the Pd hole arrays and (b) field emission scanning electron microscopy images of the fabricated hole array having a period of and an aspect ratio of 1.6.
(a) Measured transmittance spectra as a function of aspect ratio. (b) Observed variations in the transmittance spectrum of the hole array with an aspect ratio of 1.6 for a 2% exposure. All spectra were recorded with radiation polarized along the axis parallel to the width of the rectangles.
(a) Comparison between the measured and simulated peak positions of the resonance Pd/Si (1,0) mode as a function of the aspect ratio of the rectangular holes. (b) Comparison between observed and simulated shifts of the (1,0) peak as a function of the aspect ratio for a 2% exposure. (c) Contributions to the resonance peak shift of the relative permittivity variation (20% decrease in absolute value of the real/imaginary parts) and of the lateral and vertical expansion (3.5%) of the Pd layer for a 2% exposure.
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