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Output power enhancement of light-emitting diodes via two-dimensional hole arrays generated by a monolayer of microspheres
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10.1063/1.3238360
/content/aip/journal/apl/95/13/10.1063/1.3238360
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/13/10.1063/1.3238360
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of a monolayer of PS microspheres with diameter of . (b) A full 2 in. LED wafer coated with diameter PS microspheres.

Image of FIG. 2.
FIG. 2.

(a) 2D FDTD simulation for the optical behavior of PS microspheres. (b) SEM image (tilted view) of the PR-developed surface presenting some remaining microspheres. (c) SEM image (cross-sectional view) of the developed PR. The aspect ratio of the air holes arrays was 1.6.

Image of FIG. 3.
FIG. 3.

(a) SEM image of the etched surface, displaying the hexagonal arrangement of air holes. (b) SEM image of the GaN surface at an etching depth of 150 nm. (c) Full-view SEM image of a textured GaN LED; device size: .

Image of FIG. 4.
FIG. 4.

A plot of voltage-current-luminance characteristics of fabricated LEDs. The forward voltages for textured LEDs (3.24 V) were nearly identical to that of the LED without texturing (3.22 V) at an injection current of 20 mA. The output power of the LED without texturing was 2.1 mW. The output powers of the textured LEDs were 2.3/2.64/3.06 mW for etching depths of 50/100/150 nm, respectively.

Image of FIG. 5.
FIG. 5.

(a) The schematic representation of the 2D FDTD simulation. The source was located at 300 nm below the air-GaN interface. The etching depth was varied to calculate the LEE enhancement. (b) Simulated (black line) and experimental (red line) power enhancements for different etching depths.

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/content/aip/journal/apl/95/13/10.1063/1.3238360
2009-09-28
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Output power enhancement of light-emitting diodes via two-dimensional hole arrays generated by a monolayer of microspheres
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/13/10.1063/1.3238360
10.1063/1.3238360
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