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Piezoresistive transduction in multilayer polycrystalline silicon resonators
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10.1063/1.3241077
/content/aip/journal/apl/95/13/10.1063/1.3241077
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/13/10.1063/1.3241077
/content/aip/journal/apl/95/13/10.1063/1.3241077
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/content/aip/journal/apl/95/13/10.1063/1.3241077
2009-10-01
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Piezoresistive transduction in multilayer polycrystalline silicon resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/13/10.1063/1.3241077
10.1063/1.3241077
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