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Sample microfabrication. (a) Deposit and locate graphene flakes. (b) Cleaning anneal, then evaporate top oxide. (c) Pattern the heaters. [(d) and (e)] Ion mill the top surface using an Ar beam, to trim the flake and simplify the thermal analysis.
Fitting the electrical resistance of a typical heater. (a) Comparison between the experimental data (points) and the fits using a linear (blue line) or BG formula (red line). On these logarithmic axes the linear fit appears curved. (b) Residuals for the linear fit (blue), BG fit (red), and polynomial fit [green; see Eq. (1)].
Experimental measurements of the thermal contact resistance between silicon dioxide and graphene, for four samples of different thicknesses as determined by AFM (filled points, in color). Also included for comparison are the contact resistances of several related carbon materials from the literature (open points), and theoretical curves for a DMM and a MTM (lines).
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