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Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
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10.1063/1.3251072
/content/aip/journal/apl/95/16/10.1063/1.3251072
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/16/10.1063/1.3251072
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Dependence of piezoelectric response of films prepared at substrate temperature of (a) and (b) on scandium concentration.

Image of FIG. 2.
FIG. 2.

Dependence of piezoelectric response of films on substrate temperature.

Image of FIG. 3.
FIG. 3.

(a) XRD patterns of films prepared at various substrate temperatures. (b) Dependence of lattice constant of films on substrate temperature. (c) Dependence of FWHM of x-ray rocking curves of films on substrate temperature.

Image of FIG. 4.
FIG. 4.

AFM images of film surfaces prepared at substrate temperature of (a)–(c) and (d)–(f). Scandium concentration of 0% (a), (d), 36% (b), (e), and 43% (c), (f). (g) Dependence of grain size of films prepared at and on scandium concentration.

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/content/aip/journal/apl/95/16/10.1063/1.3251072
2009-10-21
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/16/10.1063/1.3251072
10.1063/1.3251072
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