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Large electromechanical coupling factor film bulk acoustic resonator with X-cut layer transfer
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10.1063/1.3258496
/content/aip/journal/apl/95/18/10.1063/1.3258496
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/18/10.1063/1.3258496
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) High order harmonics of the HBAR modulated by the first two harmonics of the thinned layer. From the modulation of the thin piezoelectric layer and are the extracted series and parallel resonances of this thin layer. (b) Fundamental and third harmonics of the pure shear mode of the self-supported thinned X-cut plate. A close to 45% is measured. Insets in (a) and (b) are schematic views of HBAR and FBAR , respectively.

Image of FIG. 2.
FIG. 2.

Comparison of the first resonance of a FBAR response simulated considering a homogeneous thickness on the , assuming an inhomogeneous thickness of the plate simulated by 20 resonators connected in parallel , and compared to the experimental admittance of the resonator.

Image of FIG. 3.
FIG. 3.

Comparison of nonoptimized simulated pass band filters based on X-cut and traditional sputtered AlN. The simulations are performed with the scattering matrix method. The stacks of AlN and band pass filters are designed so as to provide center frequency close to 2 GHz.

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/content/aip/journal/apl/95/18/10.1063/1.3258496
2009-11-05
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/18/10.1063/1.3258496
10.1063/1.3258496
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